Electrostatic Chuck ESK In Semiconductor Industry Standard
|
|
Electrostatic Chuck(ESK) Electrostatic chuck is an advantageous technology that uses electrostatic adsorption to replace traditional mechanical clamping and vacuum adsorption methods, and has wide applications in fields such as semiconductors, panel ......
HENAN ZG INDUSTRIAL PRODUCTS CO.,LTD
|
Electrostatic Chuck Aluminum Nitride Ceramic With Density 3.3g/Cm3 Surface Roughness Ra≤6um
|
... in a variety of semiconductor processes to hold the wafer during processing. ESCs employ a platen with integral electrodes which are biased with high voltage to establish an electrostatic holding force between the platen and wafer, thereby “chucking”...
Wuxi Special Ceramic Electrical Co.,Ltd
|
White Advanced Technical Ceramics Insulator Plates For Electrostatic Chucks / E-Chucks
|
White Advanced Technical Ceramics Insulator Plates For Electrostatic Chucks / E-Chucks Semiconductor Ceramic E-chuck Product Description Products : Chucks and wafer end-effectors Chucks and end-effectors are used to manipulate and carry silicon wafers thr......
Dongguan Ming Rui Ceramic Technology Co.,ltd
|
Semiconductor Quartz Isolation Ring Dry Plasma Etching Zero Contamination
|
|
... for Semiconductor Dry Plasma Etching with Excellent Uniformity and Zero Contamination A quartz isolation ring (or focus/shadow ring) in semiconductor etching guides etching gases to the wafer, controls plasma uniformity, protects the electrostatic chuck (......
Nantong Jingcai Precision Co., Ltd.
|
