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Intelligent Robotic Polishing Machine for Sapphire SiC Si wafer dome

Categories Scientific Lab Equipment
Brand Name: ZMSH
Place of Origin: China
MOQ: 1
Price: by case
Payment Terms: T/T
Supply Ability: By case
Delivery Time: 2-4 weeks
Packaging Details: custom cartons
Surface Quality: ≤20 nm
Polishing Head RMS: ≤100 nm
Polishing Head Qty: 3
Small Tool Head: YES
Airbag Head: YES
Wheel Head: YES
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Intelligent Robotic Polishing Machine for Sapphire SiC Si wafer dome

Intelligent Robotic Polishing Machine

Product Overview

The intelligent robotic polishing machine is built on a six-axis industrial robot platform (KUKA or ABB), equipped with an electronic pressure cylinder, adjustable rotary axis, and multiple polishing heads (flexible airbag, rigid tool, wheel type). Integrated with proprietary polishing software and the robot control system, it enables high-precision optical polishing for large-diameter components.

Applications cover flat optics, spherical surfaces, aspherical surfaces, off-axis aspheres, and freeform optics, with advantages in automation, stability, and adaptability.




Key Features

1. Patented Technology

  • Proprietary hardware and software with patented robotic polishing technology.

2. Digital Monitoring

  • Closed-loop sensors for force and motion control.

  • Real-time safety monitoring for liquid level, pressure, and temperature.

3. Wide Applications

  • Multiple robotic polishing heads available for different optical manufacturing requirements.

4. High Stability

  • Continuous operation ≥300 hours without performance degradation.

  • Dual impedance-matching ion source ensures stable clamping and positioning.

  • Constant-force polishing through floating-position control.

5. Software Support

  • Advanced optical processing software for surface modeling, removal function generation, simulation, results analysis, and metrology data processing.



Technical Specifications

ModelProduct NameSurface Quality (PV)Polishing Head RMSPolishing Head QtySmall Tool HeadAirbag HeadWheel HeadMax. Speed
IRP1000Intelligent Robotic Polishing System≤20 nm≤100 nm31500 rpm
IRP400Intelligent Robotic Polishing System----
SK200Robotic Small-Tool Polishing System--1N/AN/AN/A-


System Features

  1. Versatile Workpiece Capability

    • Polishing for flat surfaces, spheres, aspheres, off-axis aspheres, and freeform optics.

  2. PLC Control System

    • Monitors polishing slurry level, pressure, and temperature with alarms.

    • Upgradable to real-time density & temperature monitoring.

  3. Proprietary Polishing Software

    • Removal function generation (theoretical & experimental).

    • Simulation & robotic program generation.

  4. Advanced Auxiliary Functions

    • AutoTCP automatic calibration system.

    • High-precision coordinate measurement for workpiece positioning.


Processing Principles

  • Time-domain modulation figuring technology for precise surface shaping.

  • Constant polishing force with floating-position control, ensuring uniformity and accuracy.


Advantages

  • High automation and intelligence with robotic integration.

  • Stable and reliable for long-term operation.

  • Flexible adaptation to complex optical surfaces and ultra-precision optics manufacturing.


FAQ – Intelligent Robotic Polishing Machine

1. What types of optical components can the robotic polishing machine process?

The system supports a wide range of optical components, including flat optics, spherical surfaces, aspheres, off-axis aspheres, and freeform optics.



2. What is the achievable surface quality?

  • For the IRP1000 model, the system achieves ≤20 nm PV and ≤100 nm RMS surface quality.

  • Actual performance depends on workpiece size, material, and polishing process.,


3. Which robots are compatible with the system?

The machine is based on six-axis industrial robots, such as KUKA or ABB, ensuring stable and precise motion control.


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China Intelligent Robotic Polishing Machine for Sapphire SiC Si wafer dome factory
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