-5KV Triode Sputter Pump Ion Stainless Steel Increasing Inert Gas Pumping Rate

Ion Pump , 3L-25 , DN35CF , 21L/s Air , 6L/s Ar , -5KV , 7E-8Pa

Sputter-ion pump is vacuum generation equipment for obtaining clean and ultra-high vacuum.

The sputter-ion pump is main pump of oil less ultra-high vacuum set.

The ion pump works in a closed system which doesn't require continuous working backing pump.

Principle:

Material of anode is stainless steel barrel, and material of cathode istitanium plate. Penning discharge process ionizes gas under the joint action of magnetic field and electric field, thus realizing exhausting of gas.

Triode ion pump is improved for increasing the pumping rate for inert gas; ions of inert gas are subjected to grazing incidence into titanium grid of cathode, then neutralized, and reflected to pump wall and anode for being buried with the titanium film. As inert gas buried in the pump wall will not be released due to positive ion bombardment, the pumping speed for inert gas is increased.

Advantages:

This series of pump has advantages such as cleanness, high vacuum degree, zero noise, zero vibration and convenience in operation.

Applications:

Main applications are the scientific experiment apparatuses in the fields of high-energy particle accelerator, controlled thermonuclear reaction apparatus, electric vacuum device, semiconductor material, electronic microscope and mass spectrometer, and other industrial equipment requiring ultra-high vacuum.

Specifications:

KYKY TECHNOLOGY CO., LTD., was founded in 1958, the pioneer of vacuum technology and electron optics in China. In the past 60 years, KYKY has been dedicated to providing comprehensive vacuum solutions to the customers all over the world.

KYKY invented the first set of Turbo Molecular Pump, Commercial Helium Leak Detector and Scanning Electron Microscope in China.

KYKY offers vacuum technology solutions, consultation and services to our customers. The main products are applied in the fields of Life Science, Medicine Engineering, Automobile Industry, Aerospace, Energy Industry, Construction Materials, Modern Decoration, High-end Consumer Electronics, etc.

In the spirit of technology innovation and customer orientation. KYKY will continuously contribute to the further development in vacuum industry of China.

KYKY TECHNOLOGY CO., LTD. has many years of experiences in R & D and manufacturing of vacuum generation products, including series molecular pumps, series molecular pump stations, series ion pumps, series gate valves and supporting controllers.

Since developing the first vertical turbo molecular pump in 1970’s, KYKY always orients

to the demand-driven market, aims to meet the requirement of our customers, and continuously launches new products in the enterprise spirit of developing on innovation, Sequentially KYKY launches Oil- lubricated series turbo molecular pumps, grease-lubricated series molecular pumps and CXF-series magnetically levitated

molecular pumps.

KYKY molecular pumps are widely applied to instrument fields of mass spectrometers and surface analyzers, to optical filming, panel display, ion etching, disc manufacturing, solar cells and lighting enterprises, and to academic institutions and R & D institutes. By virtue of excellent cost performance, these products win good reputation from the majority of users. High quality products are derived from our continuous technical breakthrough and pursuit of quality.

KYKY will persistently provide better products and quality services for customers by our continuous innovation, passion and

commitment.